US Patent 11761837 Multi-axial tactile sensor

A multi-axial tactile sensor for detecting forces in directions of three axes and a moment about at least one axis includes at least four sensor elements including at least three shearing force detecting elements having beam structures provided with a first resistive layer and a second resistive layer at specific portions, and at least one pressing force detecting element having a beam structure provided with a third resistive layer and a fourth resistive layer at specific portions, the beam structures of the four sensor elements being arranged on a sensor substrate so that their respective longitudinal directions are radially arranged, and the moment about at least one axis is detected based on outputs of two or more sensor elements being arranged at positions of rotational symmetry around the center of the radial arrangement of the plurality of sensor elements.