Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoyuki Suzuki
Naoki Watanabe
Tatsuo Hatano
Tetsuya Miyashita
Date of Patent
September 19, 2023
Patent Application Number
17779873
Date Filed
November 20, 2020
Patent Citations
Patent Citations Received
Patent Primary Examiner
CPC Code
Patent abstract
The substrate transfer apparatus includes a planar motor provided in a transfer chamber and having coils arranged therein; a transfer unit movable on the planar motor; and a control unit configured to control an energization of the coils. The transfer unit includes two bases having magnets arranged thereon and configured to be movable on the planar motor, a substrate support member configured to support a substrate, and a link mechanism configured to connect the two bases and the substrate support member to each other.
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