US Patent 11948822 Substrate transfer device and substrate processing system

A substrate transfer device includes: a planar motor provided in a transfer chamber and including an array of coils, a transfer unit configured to move above the planar motor, and a controller configured to control supply of a current to the array of the coils, wherein the transfer unit includes a first base including an array of first magnets and configured to move above the planar motor, a second base including an array of second magnets and configured to move above the planar motor, the second base being arranged coaxially with the first base, and at least one arm configured to be extended or contracted by rotating the second base relative to the first base.