US Patent 11764092 Substrate transfer apparatus and substrate processing system
Patent 11764092 was granted and assigned to Tokyo Electron on September, 2023 by the United States Patent and Trademark Office.
All edits
Edits on 4 Apr, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 20 Sep, 2023
Golden AI
Edits made to:
Infobox (+21 properties)
Article (+539 characters)
US Patent 11764092 Substrate transfer apparatus and substrate processing system
Article
Patent abstract
The substrate transfer apparatus includes a planar motor provided in a transfer chamber and having coils arranged therein; a transfer unit movable on the planar motor; and a control unit configured to control an energization of the coils. The transfer unit includes two bases having magnets arranged thereon and configured to be movable on the planar motor, a substrate support member configured to support a substrate, and a link mechanism configured to connect the two bases and the substrate support member to each other.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoki Watanabe
Naoyuki Suzuki
Tatsuo Hatano
Tetsuya Miyashita
Date of Patent
September 19, 2023
Patent Application Number
17779873
Date Filed
November 20, 2020
Patent Citations
Patent Primary Examiner
CPC Code
Find more entities like US Patent 11764092 Substrate transfer apparatus and substrate processing system
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
