Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Claire E. Kardos
Brett T. Cucci
Johnatan A. Kantarovsky
Sen Liu
Siva P. Adusumilli
Date of Patent
September 19, 2023
Patent Application Number
17108543
Date Filed
December 1, 2020
Patent Citations
...
Patent Primary Examiner
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to airgap isolation structures and methods of manufacture. The structure includes: a bulk substrate material; a first airgap isolation structure in the bulk substrate material and having a first aspect ratio; and a second airgap isolation structure in the bulk substrate material and having a second aspect ratio different from the first aspect ratio.
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