US Patent 11764258 Airgap isolation structures
Patent 11764258 was granted and assigned to GlobalFoundries on September, 2023 by the United States Patent and Trademark Office.
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US Patent 11764258 Airgap isolation structures
Article
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to airgap isolation structures and methods of manufacture. The structure includes: a bulk substrate material; a first airgap isolation structure in the bulk substrate material and having a first aspect ratio; and a second airgap isolation structure in the bulk substrate material and having a second aspect ratio different from the first aspect ratio.
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Patent Applicant
Current Assignee
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Patent Number
Patent Inventor Names
Brett T. Cucci
Claire E. Kardos
Johnatan A. Kantarovsky
Sen Liu
Siva P. Adusumilli
Date of Patent
September 19, 2023
Patent Application Number
17108543
Date Filed
December 1, 2020
Patent Citations
Patent Primary Examiner
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