Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Siva P. Adusumilli0
Steven M. Shank0
Anthony K. Stamper0
John J. Ellis-Monaghan0
Date of Patent
October 29, 2019
0Patent Application Number
156456550
Date Filed
July 10, 2017
0Patent Citations
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to radio frequency (RF) switches with airgap structures and methods of manufacture. The structure includes a substrate with at least one airgap structure formed in a well region under at least one gate structure, and which extends to a junction formed by a source/drain region of the at least one gate structure.
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