Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Xin Miao
Kangguo Cheng
Tenko Yamashita
Wenyu Xu
Chen Zhang
Date of Patent
September 19, 2023
Patent Application Number
17384307
Date Filed
July 23, 2021
Patent Citations
...
Patent Primary Examiner
Patent abstract
A vertical field-effect transistor includes a substrate comprising a semiconductor material; a first set of fins formed from the semiconductor material and extending vertically with respect to the substrate; and a second set of fins extending vertically with respect to the substrate, wherein ones of the second set of fins abut ones of the first set of fins. The second set of fins comprises a dielectric material.
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