Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Renata Melamud Berger
Aaron Partridge
Markus Lutz
Paul M. Hagelin
Charles I. Grosjean
Ginel C. Hill
Date of Patent
September 26, 2023
Patent Application Number
17197378
Date Filed
March 10, 2021
Patent Citations
...
Patent Primary Examiner
Patent abstract
A microelectromechanical system (MEMS) resonator includes a substrate having a substantially planar surface and a resonant member having sidewalls disposed in a nominally perpendicular orientation with respect to the planar surface. Impurity dopant is introduced via the sidewalls of the resonant member such that a non-uniform dopant concentration profile is established along axis extending between the sidewalls parallel to the substrate surface and exhibits a relative minimum concentration in a middle region of the axis.
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