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US Patent 11781965 System and method for particles measurement

Patent 11781965 was granted and assigned to Particle Measuring Systems on October, 2023 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
‌
Particle Measuring Systems
Current Assignee
‌
Particle Measuring Systems
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11781965
Patent Inventor Names
Mehran Vahdani Moghaddam
Nir Karasikov
Ori Weinstein
Shoam Shwartz
Uri Dubin
Date of Patent
October 10, 2023
Patent Application Number
16652653
Date Filed
October 25, 2018
Patent Citations
‌
US Patent RE39783 Chemical mechanical planarization (CMP) slurry quality control process and particle size distribution measuring systems
‌
US Patent 7456960 Particle counter with improved image sensor array
‌
US Patent 7526158 System and method for high resolution optical imaging, data storage, lithography, and inspection
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US Patent 7528959 Apparatus and method for sizing nanoparticles based on interferometric field detection
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US Patent 7561267 Flow cytometer
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US Patent 7576857 Particle counter with laser diode
‌
US Patent 7630147 Laser beam shaping for pitchfork profile
‌
US Patent 7088446 Optical measurement of the chemical constituents of an opaque slurry
...
Patent Primary Examiner
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Rebecca C Bryant
CPC Code
‌
G01N 2015/1075
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G01N 15/1459
‌
G01N 15/1434
Patent abstract

An optical system for particle size and concentration analysis, includes: at least one laser that produces an illuminating beam; a focusing lens that focuses the illuminating beam on particles that move relative to the illuminating beam at known or pre-defined angles to the illuminating beam through the focal region of the focusing lens; and at least two forward-looking detectors, that detect interactions of particles with the illuminating beam in the focal region of the focusing lens. The focusing lens is a cylindrical lens that forms a focal region that is: (i) narrow in the direction of relative motion between the particles and the illuminating beam, and (ii) wide in a direction perpendicular to a plane defined by an optical axis of the system and the direction of relative motion between the particles and the illuminating beam. Each of the two forward-looking detectors is comprised of two segmented linear arrays of detectors.

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