Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jun Hatakeyama
Masahiro Fukushima
Date of Patent
October 10, 2023
Patent Application Number
17391282
Date Filed
August 2, 2021
Patent Citations
Patent Primary Examiner
Patent abstract
A resist composition comprising a quencher containing a nitroxyl radical having an iodized aliphatic hydrocarbyl group is provided. The resist composition has a high sensitivity and forms a pattern with improved LWR or CDU, independent of whether it is of positive or negative tone.
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