Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kisik Choi
Nicholas Anthony Lanzillo
Robert Robison
Christopher J. Penny
Lawrence A. Clevenger
Brent Anderson
Date of Patent
October 17, 2023
Patent Application Number
17679719
Date Filed
February 24, 2022
Patent Citations
Patent Primary Examiner
Patent abstract
Integrated chips include a dielectric layer that includes at least one trench and at least one plug region. A line is formed in the dielectric layer in the at least one trench and terminates at the plug region. A dielectric plug is formed in the plug region.
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