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US Patent 11852678 Multi-input multi-zone thermal control for device testing

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
December 6, 2022
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Date of Patent
December 26, 2023
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Patent Application Number
18076253
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Patent Citations
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US Patent 7436059 Thermoelectric cooling device arrays
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US Patent 9766287 Thermal control
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US Patent 9841772 Temperature responsive thermal bridge
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US Patent 10056225 Adjusting substrate temperature to improve CD uniformity
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US Patent 10126356 Systems and methods for conforming test tooling to integrated circuit device with whirlwind cold plate
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US Patent 10163668 Thermal dynamic response sensing systems for heaters
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US Patent 10354785 Passive thermal switch devices having thermal switch material that passively switches between a thermal insulating state and a thermal conducting state and vehicles having the same
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US Patent 10656200 High volume system level testing of devices with pop structures
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US Patent 10775408 System for testing devices inside of carriers
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US Patent 10908207 Systems and methods for conforming device testers to integrated circuit device with pressure relief valve
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•••
Patent Citations Received
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US Patent 12061227 Integrated heater and temperature measurement
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Patent Inventor Names
Gregory Cruzan
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Paul Ferrari
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Martin Fischer
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Samer Kabbani
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Karthik Ranganathan
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11852678
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Patent Primary Examiner
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Feba Pothen
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CPC Code
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G05B 15/02
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G01R 31/2877
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