US Patent 11882770 Area-selective deposition of metal nitride to fabricate devices
Is a
Date Filed
December 10, 2020
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Date of Patent
January 23, 2024
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Patent Application Number
17118192
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Patent Inventor Names
Rudy J. Wojtecki
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Matthew W. Copel
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Damon Brooks Farmer
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Charles Thomas Rettner
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Alexander Friz
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Noel Arellano
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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