Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yamato Takamizawa0
Hiroshi Kurihara0
Satsuki Narushima0
Ryuma Matsuoka0
Date of Patent
January 30, 2024
0Patent Application Number
170406380
Date Filed
March 19, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
A polishing pad is equipped with a polishing layer having a polyurethane sheet, wherein a tan δ peak value change rate determined by formula: tan δ peak value change rate=|tan δ peak
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