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US Patent 11883925 Polishing pad and method for manufacturing same
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Patent
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Date Filed
March 19, 2019
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Date of Patent
January 30, 2024
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Patent Application Number
17040638
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Patent Citations
US Patent 6860802 Polishing pads for chemical mechanical planarization
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US Patent 10195714 Polishing pad and process for producing same
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Patent Inventor Names
Yamato Takamizawa
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Hiroshi Kurihara
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Satsuki Narushima
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Ryuma Matsuoka
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11883925
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Patent Primary Examiner
Alexandra M Moore
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CPC Code
H01L 21/304
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H01L 21/67092
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C08G 18/76
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C08G 18/48
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C08G 18/38
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C08G 18/10
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B24B 37/24
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