US Patent 11894251 Transport system
Patent 11894251 was granted and assigned to Applied Materials on February, 2024 by the United States Patent and Trademark Office.
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US Patent 11894251 Transport system
Article
Patent abstract
Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alexander Berger0
Andrew J. Constant0
Jacob Newman0
Jeffrey C. Hudgens0
Martin Aenis0
Shay Assaf0
Ulrich Oldendorf0
William Tyler Weaver0
Date of Patent
February 6, 2024
0Patent Application Number
176471200
Date Filed
January 5, 2022
0Patent Citations
Patent Primary Examiner
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