Patent attributes
A robot hand includes base body defining gripping position of substrate, first contacting part provided to base body at tip-end side and configured to contact first part of edge part of substrate when substrate is gripped, rotary body provided on base-end side of base body and having second contacting part configured to contact second part of edge part of substrate when substrate is gripped, and mobile body having shaft part to be inserted into shaft hole of rotary body, and configured to move toward tip end of base body to move rotary body toward tip end of the base body. An axial-center line of shaft part extends in thickness directions of base and rotary bodies provided so as to have clearance in axial direction of shaft part with respect to shaft part.
