US Patent 8764085 Clamping device and workpiece conveying robot

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

87640850

Patent Inventor Names

Yasumichi Mieno0

Yuji Urabe0

Date of Patent

July 1, 2014

Patent Application Number

139326630

Date Filed

July 1, 2013

Patent Citations Received

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US Patent 12109681 Substrate handling device and processing chamber

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US Patent D997892 End effector for handling wafers

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US Patent 11752638 Substrate handling device and processing chamber

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US Patent 11964383 Robot hand and robot having the same

Patent Primary Examiner

‌

Stephen Vu

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