Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shu-Han Chen0
Chun-Heng Chen0
Tsung-Ju Chen0
Chi On Chui0
Date of Patent
May 21, 2024
0Patent Application Number
178669860
Date Filed
July 18, 2022
0Patent Citations
Patent Primary Examiner
Patent abstract
In an embodiment, a structure includes: a nano-structure; an epitaxial source/drain region adjacent the nano-structure; a gate dielectric wrapped around the nano-structure; a gate electrode over the gate dielectric, the gate electrode having an upper portion and a lower portion, a first width of the upper portion increasing continually in a first direction extending away from a top surface of the nano-structure, a second width of the lower portion being constant along the first direction; and a gate spacer between the gate dielectric and the epitaxial source/drain region.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.