Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shunsuke Isono0
Yuuko Tomekawa0
Masayuki Takase0
Date of Patent
May 28, 2024
0Patent Application Number
170286270
Date Filed
September 22, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
An electronic device includes: a capacitor; an insulating layer; at feast one trench provided in the insulating layer; and a first conductive plug, at least part of which is surrounded by the insulating layer. The capacitor includes: a first lower electrode provided along an inner wall of the at least one trench, a dielectric layer provided on the first lower electrode, and an upper electrode provided on the dielectric layer. At least part of the first conductive plug is positioned between an upper surface of the insulating layer and a lowermost portion of the at least one trench.
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