US Patent 12018363 Gap-fill with aluminum-containing films
Patent 12018363 was granted and assigned to Applied Materials on June, 2024 by the United States Patent and Trademark Office.
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US Patent 12018363 Gap-fill with aluminum-containing films
Article
Patent abstract
Methods for depositing film comprise depositing an aluminum-containing gap-fill film in a bottom-up manner in a feature of a substrate surface. The substrate can be sequentially exposed to an aluminum-containing precursor, a reactant, a fluorinating agent, and an etchant any number of times to promote bottom-up growth of the film in the feature.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jeffrey W. Anthis0
Lakmal C. Kalutarage0
Mark Saly0
Tatsuya E. Sato0
Date of Patent
June 25, 2024
0Patent Application Number
165772200
Date Filed
September 20, 2019
0Patent Citations
Patent Primary Examiner
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