Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kuo-Cheng Chiang0
Zhi-Chang Lin0
Shih-Cheng Chen0
Date of Patent
August 13, 2024
0Patent Application Number
176662400
Date Filed
February 7, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A semiconductor device according to the present disclosure includes an active region including a channel region and a source/drain region adjacent the channel region, a vertical stack of channel members over the channel region, a gate structure over and around the vertical stack of channel members, a bottom dielectric feature over the source/drain region, a source/drain feature over the bottom dielectric feature, and a germanium layer disposed between the bottom dielectric feature and the source/drain region.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.