US Patent 12068189 Elastic membrane, substrate holding device, and polishing apparatus
Patent 12068189 was granted and assigned to Ebara Corporation on August, 2024 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 9, 2021
0
Date of Patent
August 20, 2024
0
Patent Applicant
Patent Application Number
17371518
0
Patent Citations
Patent Inventor Names
Satoru Yamaki
0
Shingo Togashi
0
Yoshikazu Kato
0
Osamu Nabeya
0
Makoto Fukushima
0
Tomoko Owada
0
Keisuke Namiki
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 12068189 Elastic membrane, substrate holding device, and polishing apparatus
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
