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US Patent 12117739 Thermo-mechanical actuator

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Bas Jansen0

Johannes Petrus Martinus Bernardus Vermeulen0

Koen Martin Willem Jan Bos0

Date of Patent

October 15, 2024

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Patent Application Number

176292020

Date Filed

June 30, 2020

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Patent Citations

US Patent 6952253 Lithographic apparatus and device manufacturing method

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US Patent 11187990 Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror

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Patent Primary Examiner

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CPC Code

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Patent abstract

Disclosed is a thermo-mechanical actuator (

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