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US Patent 12117739 Thermo-mechanical actuator
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Patent
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Date Filed
June 30, 2020
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Date of Patent
October 15, 2024
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Patent Application Number
17629202
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Patent Citations
US Patent 6952253 Lithographic apparatus and device manufacturing method
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US Patent 11187990 Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror
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Patent Inventor Names
Bas Jansen
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Johannes Petrus Martinus Bernardus Vermeulen
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Koen Martin Willem Jan Bos
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
12117739
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Patent Primary Examiner
Deoram Persaud
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CPC Code
G03F 7/7085
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G03F 7/70875
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G03F 7/70891
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H02N 2/009
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H02N 2/028
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H02N 2/062
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G03F 7/70783
0
G03F 7/70716
0
G03F 7/707
0
G03F 7/70266
0
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