Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroshi Ono0
Date of Patent
October 22, 2024
0Patent Application Number
172652370
Date Filed
August 27, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
An electrostatic chuck of the disclosure includes a ceramic base in plate form, and an electrostatic attraction electrode. The ceramic base includes a plurality of particles containing aluminum oxide as a main component. The plurality of particles contain magnesium atoms and zirconium atoms.
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