US Patent 12125731 Electrostatic chuck and method for manufacturing electrostatic chuck
Patent 12125731 was granted and assigned to Kyocera Corporation on October, 2024 by the United States Patent and Trademark Office.
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US Patent 12125731 Electrostatic chuck and method for manufacturing electrostatic chuck
Article
Patent abstract
An electrostatic chuck of the disclosure includes a ceramic base in plate form, and an electrostatic attraction electrode. The ceramic base includes a plurality of particles containing aluminum oxide as a main component. The plurality of particles contain magnesium atoms and zirconium atoms.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroshi Ono0
Date of Patent
October 22, 2024
0Patent Application Number
172652370
Date Filed
August 27, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
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