Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
January 10, 2017
Patent Application Number
14373976
Date Filed
June 27, 2012
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention is an electrostatic chuck including a ceramic base body and an adsorption electrode provided inside of or on the lower surface of the ceramic base body and having a portion where a Mn content is 1×10−4% by mass or less in a region from the upper surface of the ceramic base body to the adsorption electrode.
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