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US Patent 9543184 Electrostatic chuck

Patent 9543184 was granted and assigned to Kyocera Corporation on January, 2017 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 12125731 Electrostatic chuck and method for manufacturing electrostatic chuck
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Patent abstract

The present invention is an electrostatic chuck including a ceramic base body and an adsorption electrode provided inside of or on the lower surface of the ceramic base body and having a portion where a Mn content is 1×10−4% by mass or less in a region from the upper surface of the ceramic base body to the adsorption electrode.

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US Patent 09543184 Electrostatic chuck US Patent 9543184 Electrostatic chuck

Infobox
Patent Number
0954318400
Patent Number
954318400
Edits on 18 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0954318400
Edits on 22 Mar, 2023
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edited on 22 Mar, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
Kyocera Corporation
Kyocera Corporation
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
095431840
Date of Patent
January 10, 2017
0
Patent Application Number
143739760
Date Filed
June 27, 2012
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=095431840
Patent Primary Examiner
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Thienvu Tran
0
Edits on 28 Sep, 2022
"Entity importer update"
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Golden AI
edited on 28 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Kyocera Corporation
Kyocera Corporation
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
095431840
Date of Patent
January 10, 2017
0
Patent Application Number
143739760
Date Filed
June 27, 2012
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=095431840
Patent Primary Examiner
‌
Thienvu Tran
0
Edits on 15 Jun, 2022
"Entity importer update"
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Golden AI
edited on 15 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09543184
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 US Patent 09543184 Electrostatic chuck

Infobox
Is a
Patent
Patent
Current assignee
Kyocera Corporation
Kyocera Corporation
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09543184
Date of patent
January 10, 2017
Patent application number
14373976
Date Filed
June 27, 2012
Patent primary examiner
‌
Thienvu Tran

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