Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Huan-Ling Lee0
Hsin-Chang Lee0
Chia-Jen Chen0
Wen-Chang Hsueh0
Date of Patent
October 29, 2024
0Patent Application Number
183434930
Date Filed
June 28, 2023
0Patent Citations
...
Patent Primary Examiner
CPC Code
Patent abstract
A reticle is provided. The reticle includes a first reflective multilayer (ML) over a mask substrate and a capping layer over the first reflective ML. The reticle also includes a first absorption layer over the capping layer and a second reflective multilayer (ML) over the first absorption layer. The reticle further includes an etch stop layer over the second reflective ML and a third reflective multilayer (ML) over the etch stop layer. In addition, the reticle includes an absorption film pair over the third reflective ML.
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