Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ssu-Yu Chen0
Hsin-Feng Chen0
Li-Jui Chen0
Chi Yang0
Date of Patent
October 29, 2024
0Patent Application Number
183047780
Date Filed
April 21, 2023
0Patent Citations
...
Patent Primary Examiner
CPC Code
Patent abstract
A method includes dispensing a droplet into a vacuum chamber; firing a pre-pulse laser to the droplet; sensing a first image of a return beam of the pre-pulse laser from the droplet; after firing the pre-pulse laser, firing a main-pulse laser to the droplet, wherein when the main-pulse laser hits the droplet, the droplet is vaporized into a plasma that emits extreme ultraviolet radiation; after sensing the first image and firing the main-pulse laser, sensing a second image of a return beam of the main-pulse laser from the droplet; and adjusting a plasma position in the vacuum chamber according to at least the second image.
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