US Patent 6844258 Selective refractory metal and nitride capping
Patent 6844258 was granted and assigned to Novellus Systems on January, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 9, 2003
0
Date of Patent
January 18, 2005
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Patent Application Number
10435010
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Patent Citations Received
Patent Inventor Names
Robert H. Havemann
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James A. Fair
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Jungwan Sung
0
Mary Anne Plano
0
Nerissa Taylor
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Sang-Hyeob Lee
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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