Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peng Cheng0
Qing Ma0
Valluri Rao0
Date of Patent
February 21, 2006
0Patent Application Number
109213830
Date Filed
August 19, 2004
0Patent Citations Received
0
...
Patent Primary Examiner
Patent abstract
A microelectromechanical (MEMS) resonator with a vacuum-cavity is fabricated using polysilicon-enabled release methods. A vacuum-cavity surrounding the MEMS beam is formed by removing release material that surrounds the beam and sealing the resulting cavity under vacuum by depositing a layer of nitride over the structure. The vacuum-cavity MEMS resonators have cantilever beams, bridge beams or breathing-bar beams.
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