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US Patent 7002436 Vacuum-cavity MEMS resonator

Patent 7002436 was granted and assigned to Intel on February, 2006 by the United States Patent and Trademark Office.

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Patent abstract

A microelectromechanical (MEMS) resonator with a vacuum-cavity is fabricated using polysilicon-enabled release methods. A vacuum-cavity surrounding the MEMS beam is formed by removing release material that surrounds the beam and sealing the resulting cavity under vacuum by depositing a layer of nitride over the structure. The vacuum-cavity MEMS resonators have cantilever beams, bridge beams or breathing-bar beams.

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Is a
Patent
Patent
0
Current Assignee
Intel
Intel
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
70024360
Patent Inventor Names
Peng Cheng0
Qing Ma0
Valluri Rao0
Date of Patent
February 21, 2006
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Patent Application Number
109213830
Date Filed
August 19, 2004
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Patent Primary Examiner
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Barbara Summons
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"Created via: Patent creation backfill"
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 US Patent 7002436 Vacuum-cavity MEMS resonator

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