US Patent 7002436 Vacuum-cavity MEMS resonator
Patent 7002436 was granted and assigned to Intel on February, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 19, 2004
0
Date of Patent
February 21, 2006
0
Patent Application Number
10921383
0
Patent Citations Received
Patent Inventor Names
Peng Cheng
0
Qing Ma
0
Valluri Rao
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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