Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
John M. White0
Ernst Keller0
Wendell T. Blonigan0
Date of Patent
March 28, 2006
0Patent Application Number
107295650
Date Filed
December 5, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.
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