US Patent 7017269 Suspended gas distribution plate
Patent 7017269 was granted and assigned to Applied Materials on March, 2006 by the United States Patent and Trademark Office.
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Patent abstract
A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.
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Patent Inventor Names
Ernst Keller0
John M. White0
Wendell T. Blonigan0
Date of Patent
March 28, 2006
0Patent Application Number
107295650
Date Filed
December 5, 2003
0Patent Primary Examiner
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US Patent 7017269 Suspended gas distribution plate
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