Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Christiaan Alexander Hoogendam0
Jan-Gerard Cornelis Van Der Toorn0
Date of Patent
October 10, 2006
0Patent Application Number
109661110
Date Filed
October 18, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
To facilitate, for example, removal of a substrate between exposures of different substrates, an actuated closing plate is used to replace a substrate, a substrate table, or both, as a part of a boundary of a space in a lithographic apparatus containing liquid without, for example, breaking a seal containing the liquid.
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