US Patent 7119876 Lithographic apparatus and device manufacturing method
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Patent Inventor Names
Christiaan Alexander Hoogendam0
Jan-Gerard Cornelis Van Der Toorn0
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Patent abstract
To facilitate, for example, removal of a substrate between exposures of different substrates, an actuated closing plate is used to replace a substrate, a substrate table, or both, as a part of a boundary of a space in a lithographic apparatus containing liquid without, for example, breaking a seal containing the liquid.
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US Patent 07119876 Lithographic apparatus and device manufacturing method US Patent 7119876 Lithographic apparatus and device manufacturing method
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Patent Number
071198760
Patent Number
71198760
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Patent Jurisdiction
Patent Number
071198760
Date of Patent
October 10, 2006
0Patent Application Number
109661110
Date Filed
October 18, 2004
0Official Website
Patent Primary Examiner
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US Patent 07119876 Lithographic apparatus and device manufacturing method
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Is a
Patent jurisdiction
Patent number
07119876
Date of patent
October 10, 2006
Patent application number
10966111
Date Filed
October 18, 2004
Patent primary examiner
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