Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Lutz Aschke0
Hrabanus Hack0
Jochen Alkemper0
Date of Patent
October 31, 2006
0Patent Application Number
106280590
Date Filed
July 25, 2003
0Patent Primary Examiner
Patent abstract
The present invention relates to a substrate in particular of EUV microlithography, to the production of a substrate of this type and to the use of this substrate as a substrate for mirrors and/or masks or mask blanks in particular in EUV microlithography.
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