US Patent 7129010 Substrates for in particular microlithography
Patent 7129010 was granted and assigned to Schott AG on October, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 25, 2003
0
Date of Patent
October 31, 2006
0
Patent Application Number
10628059
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Patent Inventor Names
Lutz Aschke
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Hrabanus Hack
0
Jochen Alkemper
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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