Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Philip A. Lamarre0
Date of Patent
June 12, 2007
0Patent Application Number
107100230
Date Filed
June 14, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Multilayer resist systems and techniques used for liftoff or planarizing topography wherein the dimensions and thicknesses of the layers are independently controlled. The undercut may also be independently controlled for precision structures.
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