Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akimitsu Ebihara0
Date of Patent
January 22, 2008
Patent Application Number
11258846
Date Filed
October 27, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
A hydrostatic bearing is provided opposite to a wafer on a table. The hydrostatic bearing maintains the distance between the bearing surface and the wafer in the direction of the optical axis of a projection optical system at a predetermined value.
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