US Patent 7329321 Enhanced wafer cleaning method
Patent 7329321 was granted and assigned to Lam Research on February, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 17, 2005
0
Date of Patent
February 12, 2008
0
Patent Application Number
11061944
0
Patent Inventor Names
Mark Wilcoxson
0
Seokmin Yun
0
John M. Boyd
0
John deLarios
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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