US Patent 7331283 Method and apparatus for imprint pattern replication
Patent 7331283 was granted and assigned to ASML Holding on February, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 16, 2004
0
Date of Patent
February 19, 2008
0
Patent Application Number
11012598
0
Patent Inventor Names
Harry Sewelll
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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