US Patent 7361915 Beam current stabilization utilizing gas feed control loop

Patent 7361915 was granted and assigned to Axcelis Technologies on April, 2008 by the United States Patent and Trademark Office.

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Patent Inventor Names

Bo H. Vanderberg0

Robert D. Rathmell0

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Patent abstract

One or more aspects of the present invention pertain to stabilizing the current or density of an ion beam within an ion implantation system by selectively adjusting a lone parameter of feed gas flow. Adjusting the gas flow does not necessitate adjustments to other operating parameters and thereby simplifies the stabilization process. This allows the beam current to be stabilized relatively quickly so that ion implantation can begin promptly and continue uninterrupted. This improves throughput while reducing associated implantation costs.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=073619150

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