US Patent 7361915 Beam current stabilization utilizing gas feed control loop
Patent 7361915 was granted and assigned to Axcelis Technologies on April, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 30, 2005
0
Date of Patent
April 22, 2008
0
Patent Application Number
11290346
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Patent Inventor Names
Bo H. Vanderberg
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Robert D. Rathmell
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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