Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 3, 2008
Patent Application Number
11189102
Date Filed
July 25, 2005
Patent Primary Examiner
Patent abstract
An optical component has a coating including one or more layers at each reflecting surface. The coating causes the optical component to have polarization eigenstates that are substantially linear and to have the properties of a half-wave plate. The coated optical component can be used in interferometry and microlithography system.
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