US Patent 7382466 Coating for reflective optical components
Patent 7382466 was granted and assigned to Zygo on June, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 25, 2005
Date of Patent
June 3, 2008
Patent Application Number
11189102
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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